Flip Chip Bump 3D Inspection Equipment using White Light Interferometer with Large F.O.V.
نویسندگان
چکیده
منابع مشابه
In-Situ Surface Inspection Using White Light Channelled Spectrum Interferometer
We introduce a new environmentally robust optical interferometry system for fast surface profile measurement. The proposed white light channelled spectrum Interferometer (WLCSI) is effective for applications in on-line surface inspection because it can obtain a surface profile in a single shot. Compared to the traditional spectral interferometry techniques, cylindrical lens is used in the Miche...
متن کاملIn-Situ Surface Inspection Using White Light Channelled Spectrum Interferometer
We introduce a new environmentally robust optical interferometry system for fast surface profile measurement. The proposed white light channelled spectrum Interferometer (WLCSI) is effective for applications in on-line surface inspection because it can obtain a surface profile in a single shot. Compared to the traditional spectral interferometry techniques, cylindrical lens is used in the Miche...
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ژورنال
عنوان ژورنال: Journal of Korean Institute of Intelligent Systems
سال: 2013
ISSN: 1976-9172
DOI: 10.5391/jkiis.2013.23.4.286